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Influence of annealing on the physical and optical properties of Ge thin films deposited using thermal evaporation

*Isom Hilmi orcid scopus  -  Department of Physics, Faculty of Applied Science and Technology, Universitas Ahmad Dahlan, Tamanan, Banguntapan, Bantul, Yogyakarta, Indonesia
Muhammad Kevin Adam  -  Department of Physics, Faculty of Applied Science and Technology, Universitas Ahmad Dahlan, Tamanan, Banguntapan, Bantul, Yogyakarta, Indonesia
Joko Purwadi  -  Department of Mathematics, Faculty of Applied Science and Technology, Universitas Ahmad Dahlan, Tamanan, Banguntapan, Bantul, Yogyakarta, Indonesia
Qidir Maulana Binu Soesanto  -  Department of Physics, Faculty of Sciences and Mathematics, Diponegoro University, Semarang, Indonesia
Damar Yoga Kusuma  -  Department of Physics, Faculty of Applied Science and Technology, Universitas Ahmad Dahlan, Tamanan, Banguntapan, Bantul, Yogyakarta, Indonesia
Received: 24 Sep 2024; Revised: 21 Nov 2024; Accepted: 23 Dec 2024; Available online: 31 May 2025; Published: 31 May 2025.

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Abstract

Germanium (Ge) is extensively utilized in various technological applications, particularly in optoelectronic devices due to its favorable electronic properties. In this study, Ge thin films were deposited onto soda-lime glass substrates using the thermal evaporation technique. The deposited films were subsequently subjected to annealing at temperatures ranging from 200 to 700 °C. Comprehensive characterization of the films was performed using XRD to analyze crystallinity, UV-Vis spectroscopy to evaluate optical properties, and SEM to investigate surface topography. The annealing process induced a significant phase transformation from an amorphous state to a co-existing Ge and GeO2 structures, as evidenced by XRD measurements. This structural evolution was accompanied by notable changes in the optical properties of the films. Specifically, an increase in annealing temperature resulted in a higher absorbance in the longer wavelength regions of the UV-Vis spectrum. These findings highlight the possibility of a controlled manipulation on the structural and optical characteristics of Ge thin films by thermal treatment, with potential applications in optoelectronic devices.

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Keywords: Annealing, Ge, XRD, Absorbance, bandgap

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