DOI: https://doi.org/10.14710/jpa.v4i1.12331

Layer deposition of titanium dioxide (TiO2) using DC-sputtering method with variation of deposition time: study of microstructure and coating hardness

Uli Aprilia Mukaromah  -  Department of Physics, Faculty of Science and Mathematics, Diponegoro University, Semarang, Indonesia
Wiwien Andriyanti  -  PSTA BATAN, Jl. Babarsari PO BOX 6101 YKBB, Yogyakarta, Indonesia
*Heri Sutanto orcid scopus publons  -  Department of Physics, Faculty of Sciences and Mathematics - Diponegoro University, Indonesia
Nuha Nazilah Sahabudin  -  Department of Physics, Faculty of Science and Mathematics, Diponegoro University, Semarang, Indonesia
Received: 20 Sep 2021; Revised: 26 Nov 2021; Accepted: 27 Nov 2021; Available online: 29 Nov 2021; Published: 30 Nov 2021.

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Abstract

The A thin layer of titanium dioxidehas been deposited using the DC-Sputtering method at various time of deposition of 30 minutes, 60 minutes, 90 minutes, 120 minutes and 150 minutes. This study aims to grow a layer of TiO2 on the surface of stainless steel 316L with a certain time variation to determine the characterization of the microstructure, hardness, and properties of the coating to the water contact angle. The XRD test results show that the titanium dioxide (TiO2) thin layer has a TiO2-monoclinicstructure corresponding to the planes (133), (133), (220), (133) and (133), while the crystallite size can be determined using Debye-scherrer Equation were ~14.34318 nm, ~17.09422 nm, ~18.94568 nm, ~14.04389 nm, and ~7.90887 nm, respectively. The hardness value was obtained through the Vickers Hardness Test and it is known that the TiO2 layer can increase the hardness value by ~48.175% with a maximum hardness value of 170.105 VHN at a deposition time of 90 minutes. Observations from the contact angle test can be seen that the TiO2 layer is hydrophilic.

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Keywords: Titanium dioxida; DC-Sputtering; Stainless steel 316

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