skip to main content

Layer deposition of titanium dioxide (TiO2) using DC-sputtering method with variation of deposition time: study of microstructure and coating hardness

Uli Aprilia Mukaromah  -  Department of Physics, Faculty of Science and Mathematics, Diponegoro University, Semarang, Indonesia
Wiwien Andriyanti  -  PSTA BATAN, Jl. Babarsari PO BOX 6101 YKBB, Yogyakarta, Indonesia
*Heri Sutanto orcid scopus publons  -  Department of Physics, Faculty of Sciences and Mathematics - Diponegoro University, Indonesia
Nuha Nazilah Sahabudin  -  Department of Physics, Faculty of Science and Mathematics, Diponegoro University, Semarang, Indonesia
Received: 20 Sep 2021; Revised: 26 Nov 2021; Accepted: 27 Nov 2021; Available online: 29 Nov 2021; Published: 30 Nov 2021.

Citation Format:
Abstract

The A thin layer of titanium dioxidehas been deposited using the DC-Sputtering method at various time of deposition of 30 minutes, 60 minutes, 90 minutes, 120 minutes and 150 minutes. This study aims to grow a layer of TiO2 on the surface of stainless steel 316L with a certain time variation to determine the characterization of the microstructure, hardness, and properties of the coating to the water contact angle. The XRD test results show that the titanium dioxide (TiO2) thin layer has a TiO2-monoclinicstructure corresponding to the planes (133), (133), (220), (133) and (133), while the crystallite size can be determined using Debye-scherrer Equation were ~14.34318 nm, ~17.09422 nm, ~18.94568 nm, ~14.04389 nm, and ~7.90887 nm, respectively. The hardness value was obtained through the Vickers Hardness Test and it is known that the TiO2 layer can increase the hardness value by ~48.175% with a maximum hardness value of 170.105 VHN at a deposition time of 90 minutes. Observations from the contact angle test can be seen that the TiO2 layer is hydrophilic.

Fulltext View|Download
Keywords: Titanium dioxida; DC-Sputtering; Stainless steel 316

Article Metrics:

  1. Ferreri, I., Calderon V., S., Escobar Galindo, R., Palacio, C., Henriques, M., Piedade, A. P., & Carvalho, S. (2015). Silver activation on thin films of Ag-ZrCN coatings for antimicrobial activity. Materials Science and Engineering C, 55, 547–555
  2. Wang, Y., Wang, S., Zou, Y., Wu, Y., Chen, G., Ouyang, J., Jia, D., & Zhou, Y. (2020). A self-adjusting PTFE/TiO2 hydrophobic double-layer coating for corrosion resistance and electrical insulation. Chemical Engineering Journal, 402(March), 126116
  3. Tavares, S.S.M., Mainier, F.B., Zimmerman, F., Freitas, R., Ajus, C.M.I., (2010). Characterization of prematurely failed stainless steel orthopedic implants. Eng Fail Anal. 1246–1253
  4. Chen, Q., & Thouas, G. A. (2015). Metallic implant biomaterials. Materials Science and Engineering R: Reports, 87, 1–57
  5. Setiawan, A., & Dewi, A. K. (2019). Korosi Baja Karbon Tercoating Zinc Fosfat Pada Media Asam Sulfat. J. Teknologi, 11(1), 57–66
  6. Cita, I.D., Kurniawan, B. A.,. (2017). Pengaruh Komposisi Paduan Dan Tebal Coating Pada Proses Flame- Sprayed Coating Serbuk Zn-Al Terhadap Laju Korosi Baja Karbon. Master’s Program Thesis, Institut Teknologi Sepuluh Nopember
  7. Lelis, M., Tuckute, S., Varnagiris, S., Urbonavicius, M., Laukaitis, G., & Bockute, K. (2019). Tailoring of TiO2 film microstructure by pulsed-DC and RF magnetron co-sputtering. Surface and Coatings Technology, 377(June)
  8. Florea, D. A., Albuleț, D., Grumezescu, A. M., & Andronescu, E. (2020). Surface modification – A step forward to overcome the current challenges in orthopedic industry and to obtain an improved osseointegration and antimicrobial properties. Materials Chemistry and Physics, 243 (December 2019), 122579
  9. Bai, W., Chen, K., Chen, J., Xu, J., Lin, H., Lin, Y., Xu, Y., & Lin, J. (2020). Natural Highly-hydrophobic urushiol/TiO2 coated cotton fabric for effective oil–water separation in highly acidic alkaline and salty environment. Separation and Purification Technology, 253(August), 117495
  10. Chen, W., Ran, X., Jiang, X., Min, H., Li, D., Zou, L., Fan, J., & Li, G. (2014). Synthesis of TiO2 and TiO2/Pt and Their Application in Photocatalytic Degradation of Humic Acid. Water Environment Research, 86(1), 48–55
  11. Setyani, A., & Wibowo, E. A. P. (2017). Fabrikasi Nanotubes Titanium Dioksida (TiO2) Menggunakan Metode Hidrotermal. Jurnal Kimia VALENSI, 3(1), 20–26
  12. Sujitno, T., Santoso, A., Wiryoadi, Sayono, Siswanto, B., & Susita, L. (2002). Optimasi parameter proses sputtering pada deposisi lapis tipis titanium nitrida (TiN) pada bahan aluminium. Prosiding Pertemuan Dan Presentasi. Penelitian Dasar IImu Pengetahuan Dan Teknologi Nuklir P3TM-BATAN, 156–165
  13. Bellam, J. B., Kandikunta, G., Manupati, B., Debabrata, S., George, P., & Verma, V. (2020). DC sputter deposited TiO2 thin film on ITO/glass substrate for perovskite based solar cell application. Materials Today: Proceedings
  14. Widodo, S. (2012). Teknologi Pendeposisian Film Tipis Metal Dengan Metode DC-Sputtering. Seminar Nasional Fisika, 6
  15. Lee, J. H., Jang, G. E., & Jun, Y. H. (2012). Investigation and evaluation of structural color of TiO 2 coating on stainless steel. Ceramics International, 38(SUPPL. 1), S661–S664. https://doi.org/10.1016/j.ceramint.2011.05.130
  16. Hafizi, I., Widjijono, W., & Soesatyo, M. H. N. E. (2016). Penentuan konsentrasi stainless steel 316L dan kobalt kromium remanium GM-800 pada uji GPMT. Majalah Kedokteran Gigi Indonesia, 2(3), 121
  17. ASTM, (2004). Standard Specification for Chromium and Chromium-Nickel Stainless Steel Plate, Sheet, and Strip for Pressure Vessels and for General Applications, in: A 240/A 240M. ASTM International, United States of America
  18. Hadiati, S., (2013). Kajian Variasi Suhu Annealing Dan Holding Time Pada Penumbuhan Lapisan Tipis Bazr0,15ti0,85o3 Dengan Metode Sol Gel. Jurnal MIPA. 36(1), 20–27
  19. Sujitno, T., Santoso, A., Wiryoadi, Sayono, Siswanto, B., & Susita, L. (2002). Optimasi parameter proses sputtering pada deposisi lapis tipis titanium nitrida (TiN) pada bahan aluminium. Prosiding Pertemuan Dan Presentasi. Penelitian Dasar IImu Pengetahuan Dan Teknologi Nuklir P3TM-BATAN, 156–165
  20. Sulhadi, Wahyuni. S., Mulyani. S., Carieta. V.A., Aryanto. D., Sugianto, Marwoto. P2019, Fabrikasi Film Tipis ZnO;Ga dengan Metode DC Magnetron Sputtering Pengaruh Daya Plasma dan Suhu Anneling
  21. Sulisa, M.D., (2010). Pengaruh Sudut Kontak Statis terhadap Penyebaran Droplet di atas Permukaan Padat yang Dipanaskan pada Bilangan Weber Menengah. Jurnal Mechanical. Vol-1. 1-2
  22. Bai, W., Chen, K., Chen, J., Xu, J., Lin, H., Lin, Y., Xu, Y., & Lin, J. (2020). Natural Highly-hydrophobic urushiol/TiO2 coated cotton fabric for effective oil–water separation in highly acidic alkaline and salty environment. Separation and Purification Technology, 253(August), 117495
  23. Takata, Y., Hidaka, S., Masuda, M., and Ito, T. (2003) Pool Boiling on a Superhydrophilic Surface, Int. J. Energy Res. 27 111–119
  24. Wang, Y., Wang, S., Zou, Y., Wu, Y., Chen, G., Ouyang, J., Jia, D., & Zhou, Y. (2020). A self-adjusting PTFE/TiO2 hydrophobic double-layer coating for corrosion resistance and electrical insulation. Chemical Engineering Journal, 402(March), 126116
  25. Suroto, J. (2017). Pengaruh Nilai Wettability Pada Pool Boiling Heat Transfer Studi Kasus Hydrophobic, Hydrophilic Dan Superhydrophilic. Jurnal Ilmu Dan Inovasi Fisika, 1(1), 65–69
  26. Turnip, L. B., Handani, S., & Mulyadi, S. (2015). Pengaruh Penambahan Inhibitor Ekstrak Kulit Buah Manggis Terhadap Penurunan Laju Korosi Baja ST-37 Lusiana Br Turnip, Sri Handani, Sri Mulyadi. Jurnal Fisika Unand, 4(2), 144–149
  27. Lamour, G., Hamraoui, A., Buvailo, A., Xing, Y., Keuleyan, S., Prakash, V., Eftekhari-Bafrooei, A., dan Borguet, E., (2010), "Contact Angle Measurements Using a Simplified Experimental Setup", J. Chem. Educ. 87, 1403–1407
  28. Fritzsche, J., Peuker, U.A., 2015. "Wetting and Adhesive Forces on Rough Surfaces – An Experimental and Theoretical Study". Procedia Eng., New Paradigm of Particle Science and Technology Proceedings of The 7th World Congress on Particle Technology 102, 45–53

Last update:

No citation recorded.

Last update:

No citation recorded.